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接(jie)口 SSI$n測量(liang)長度(du)  25~5500 mm$n重復(fu)精度(du) ≤ ± 5 µm$n$n$n$n$n$n巴魯夫BALLUFF位移傳感器$n線性偏(pian)差d = 1, 2, 3, 7: ± 30µm, d = 4, 5, 6, 8: ± 2 LSB$n工作電(dian)壓Ub 10~30 VDC$n環境溫度(du) -40...60 °C